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MEMS : design and fabrication /
Published 2006
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Microengineering, MEMS, and interfacing : a practical guide /
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Banks, Danny
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Foundations of MEMS /
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Liu, Chang
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Mechanical design of microresonators : modeling and applications /
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Lobontiu, Nicolae
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Micro electro mechanical system design /
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Allen, James J
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MEMS : applications /
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Introduction to microfluidics /
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Tabeling, Patrick
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Microfabrication and nanomanufacturing /
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Fabrication of silicon microtip by isotropic and anisotropic etching process
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Anurat Wisitsora-at
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การสร้างอาเรย์ของเซ็นเซอร์สัมผัสแบบเพียโซรีซีสทีพโดยเทคโนโล...
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ถนอม โลมาศ
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Numerical simulation of mechatronic sensors and actuators /
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Kaltenbacher, Manfred
Published 2004
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CMOS-MEMS /
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Smart MEMS and sensor systems /
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Gaura, Elena
Published 2006
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Silicon carbide micro electromechanical systems for harsh environments /
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Separation methods in microanalytical systems /
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Enabling technology for MEMS and nanodevices /
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Development of an integrated vacuum microelectronic tactile sensor array
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Wen, Z
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Static and dynamic characterization of a piston-type micro-electro-mechanical systems (MEMS) mirror
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Adisorn Tuantranont
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Micromachines as tools for nanotechnology /
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Micromechanics and nanoscale effects : MEMS, multi-scale materials and micro-flows /
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