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MEMS : design and fabrication /
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Microengineering, MEMS, and interfacing : a practical guide /
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Foundations of MEMS /
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Smart MEMS and sensor systems /
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Silicon carbide micro electromechanical systems for harsh environments /
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Separation methods in microanalytical systems /
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Smart material systems and MEMS : design and development methodologies /
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MEMS and Microstructures in aerospace applications /
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MEMS design and fabrication /
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MEMS introduction and fundamentals /
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MEMS applications /
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MEMS and Microstructures in aerospace applications
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Separation methods in microanalytical systems
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MEMS/NEMS : handbook techniques and applications /
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Microengineering, MEMS, and interfacing a practical guide /
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Fundamentals of bioMEMS and medical microdevices /
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Year of Publication: 2006
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