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Microfabrication and nanomanufacturing
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book distributed by CRC Press. Purchase or institutional license may be required for access.
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MEMS design and fabrication /
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MEMS introduction and fundamentals /
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MEMS applications /
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MEMS and Microstructures in aerospace applications
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Separation methods in microanalytical systems
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MEMS/NEMS : handbook techniques and applications /
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Microengineering, MEMS, and interfacing a practical guide /
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Fundamentals of bioMEMS and medical microdevices /
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Fundamentals and applications of microfluidics /
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Year of Publication: 2006
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Suggested Topics: Microelectromechanical systems
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